Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations
Title
Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations
Identifier
/unibl/sci/idNaucniRad:3726
Type
See all items with this valueConference Paper
Date
Bibliographic Citation
Ž. Mrčarica, V. Risojević, M. Lenczner, M. Jakovljević, V. Litovski, Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations, Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306, pp. 306 - 315, Mar, 1999
page start
306
page end
315
presented at
Design, Test, and Microfabrication of MEMS/MOEMS
Is Part Of
See all items with this valueProc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306
list of authors
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