Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations

Title

Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations

Identifier

/unibl/sci/idNaucniRad:3726

Type

Date

Bibliographic Citation

Ž. Mrčarica, V. Risojević, M. Lenczner, M. Jakovljević, V. Litovski, Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations, Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306, pp. 306 - 315, Mar, 1999

References

page start

306

page end

315

presented at

Design, Test, and Microfabrication of MEMS/MOEMS

Is Part Of

Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306

list of authors

Relation

Position: 3372 (51 views)