Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations

Title

Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations

Identifier

/unibl/sci/idNaucniRad:3726
info:doi/10.1117/12.341214

Type

See all items with this valueConference Paper
See all items with this valuetext

Date

See all items with this value1999-03

Bibliographic Citation

Ž. Mrčarica, V. Risojević, M. Lenczner, M. Jakovljević, V. Litovski, Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations, Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306, pp. 306 - 315, Mar, 1999

References

http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=984703

page start

306

page end

315

presented at

Design, Test, and Microfabrication of MEMS/MOEMS

Is Part Of

See all items with this valueProc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306

list of authors

See all items with this valueŽeljko Mrčarica
See all items with this valueVladimir Risojević
See all items with this valueMichel Lenczner
See all items with this valueMirko Jakovljević
See all items with this valueVančo Litovski

Relation

See all items with this valueElektrotehnički fakultet

Position: 10275 (35 views)